Hard-coats extend the life of ESCs

Comprised of diamond-like-carbon (DLC) and other nanocomposite materials, these hard-coats are designed to meet the resistivity requirements of the ESC while protecting electronic layers. The hard-coats, which meet chamber process compatibility requirements, have a broad range of chemical resistance and can withstand high-temperature heated chuck applications.

Suitable for use with new or refurbished ESCs, which may or may not have been designed with a sacrificial wear layer, the hard-coats are available for CVD, PVD, etch and ion implant processes. Featuring mesa patterning for low defectivity, the Diamonex technical hard-coats are also suitable for high temperature processes.