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ULVAC

  • Head Office Plant 2500 Hagisono Chigasaki, Kanagawa
    253-8543
    Japan
  • +81-467-89-2033
  • http://
  • +81-467-82-9114

ULVAC Articles

Displaying 1 - 6 of 6
Component Management
26th March 2015
500°C process enables PZT MEMS integration on CMOS

ULVAC has announced a low temperature PZT sputtering technology in mass production scale, enabling next-gen MEMS devices integrated on CMOS. Today, sensors such as accelerometers, gyros and pressure sensors are widely used inside smart phones, tablets and vehicles, enabled by the piezoelectric MEMS device using thin film PZT (lead zirconate titanate, Pb(Zr,Ti)O3).

Pending
1st December 2011
ULVAC Develops and Sells 'ENTRONTM-EX2 W300 CVD-Ni/CVD-Co' Film Formation System for the Silicide Process for 3D Devices

ULVAC, Inc. announces that it has developed a new system to enhance its ENTRONTM-EX W300 300mm system series, which has a proven track record at plants mass producing semiconductors worldwide. The newly-developed ENTRONTM-EX2 W300 CVD-Ni/CVD-Co system offers CVD-Ni and CVD-Co processing for 3D devices. Its processing capabilities vastly improve productivity and enable greater investment efficiency.

Test & Measurement
17th November 2011
ULVAC-RIKO Releases Laser Flash Method Thermal Constant Measuring System TC-1200RH

ULVAC-RIKO,Inc. has developed a system called Laser Flash Method Thermal Constant Measuring System TC-1200RH, which enables stable measurement in low temperature ranges and drastically cut down the measurement time, and will launch the sales on November 17, 2011.

Test & Measurement
27th October 2011
ULVAC Introduces Multi Ionization Gauge 'SH2', Spectroscopic Ellipsometer 'UNECS-3000A' and Pendulum Valves 'VFR-400' and 'VFR-500'

ULVAC, Inc. introduces the SM2, a transducer type multi ionization gauge which can connect gauge heads with different measurement ranges. ULVAC also releases, the UNECS-3000A, an automatic high-speed spectroscopic ellipsometer which can measure the thickness of a thin film, as well as, optical constant. Finally, ULVAC announces the launch of the VFR-400 and VFR-500, large pendulum valves for FPD manufacturing equipment, used in markets such as or...

Sensors
5th October 2011
Reliance Electric Develops and Sells a New Surface Defect Detecting System 'MSC9000' for Coil Centers and the Converting Industry

Reliance Electric is pleased to announce that it has developed the MSC9000 that has a new concept of a surface defect detecting system for the steel plate industry. Sales of the product will begin in October. This new product reflects both the control technology that the company has created from its own line drive applications as well as the techniques for user operation that the company has learned from design applications.

Pending
6th September 2011
ULVAC Develops and Commercializes the Large Pendulum Valve 'VFR-400' and 'VFR-500' for the Organic EL Manufacturing and Large Vacuum Equipments

ULVAC, Inc. is pleased to announce that we have developed and commercialized large pendulum valves VFR-400 and VFR-500 for FPD manufacturing equipment such as organic EL (electroluminescent) manufacturing equipments and large vacuum equipments which will go on sale in September 2011.

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