Dispense system targets 3D & MEMS applications
Expanding its IntelliGen family of two-stage dispense technologies used in microelectronics manufacturing processes, Entegris has introduced the IntelliGen MV. This builds upon the performance of the IntelliGen Mini and HV dispense systems with a solution optimised for 3D and MEMS applications, enabling high-purity filtration and repeatable dispense of mid-viscosity fluids.
The IntelliGen MV's compact design enables multiple dispense systems to be installed into a single track. This allows manufacturers to process several chemistries simultaneously and maximise filter performance even in the most sensitive photochemicals between 100 and 300cP.
Todd Edlund, Chief Operating Officer, Entegris, comments: "With the growth of 3D IC technology and MEMS, manufacturers are requiring a higher level of throughput and greater filtration capabilities to meet their unique process demands. Each application requires an intensive focus on real-time, interactive diagnostics and feedback. The IntelliGen MV provides several new diagnostic and detection features to reduce defects, simplify recipe programming and improve filter priming."
Entegris will demonstrate the IntelliGen MV dispense system at the SEMICON Korea 2015 tradeshow this week.
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