Parametric tester meets 28nm to 3nm process node needs

30th October 2018
Posted By : Mick Elliott

Leading semiconductor test equipment supplier Advantest has released its V93000 SMU8 parametric tester to meet chip makers’ process-characterisation and monitoring needs for the exacting measurements required on the 28nm to 3nm process nodes and beyond.

With per-pin source measurement units (SMU) for next-generation DC parametric testing, the system allows users to quickly measure and verify electrical and timing characteristics at any device pin, thereby enabling more cost-efficient manufacturing and faster time to market for new IC designs.

The V93000 SMU8 helps to ensure process quality by performing either in-line or end-of-line testing in both product-development and production environments.

In labs, the system’s ability to handle very large volumes of data enables fast and cost-efficient parallel testing of new designs.

On the production monitor floor, its serial-testing capabilities has shown it can evaluate entire wafers in 30 minutes or less.

“Our new test solution offers parallel throughput at the price of a serial tester,” said Ben Morris, marketing and applications manager at Advantest. “It’s ideal for meeting the needs of fast-growing semiconductor markets by ensuring the electrical and timing performance of today’s low-current logic, mixed-signal and memory processes all the way from engineering through manufacturing. As a parallel-ready tester, the SMU8 can generate large volumes of process data when the fab is ready for it.”

Using Advantest’s C-Class test head, the small-footprint V93000 SMU8 operates over a voltage range of +10 volts with a current range of +50 milliamps per channel. It is available in 24-pin to 112-pin configurations with per-pin source-measurement resources.

Each SMU card has eight channels capable of 500 microvolt voltage-setting accuracy and 500 femtoamp current-measuring accuracy.

Equipping the V93000 SMU8 with the optional DC Scale AVI64 universal analog pin module extends the system’s voltage capability to -40 volts to +80 volts to accommodate an even wider range of ICs processes including memory.

The module’s per-pin arbitrary waveform generator (AWG) can produce virtually any waveform while running multiple pulse generators simultaneously, especially useful for floating-gate processes.

Several of Advantest’s strategic partners have already installed V93000 SMU8 units in their R&D facilities.

Use of the new tester in volume production is expected to begin in the first quarter of 2019.


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